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[SCIE] High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process / MACHINES
2024-01-25 14:43:27 31

Title : High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process

Authors : Do-Hyeon Choi, In-Jun Yang, Min-Ki Hong, Dong-Hoon Jung, Won-Ho Kim

Date of Publication : 2023.10

DOI : https://doi.org/10.3390/machines11110991


Edition : SCIE

Journal : Machines

ISSN : 2075-172

Region : 스위스

Category : ENGINEERING, MECHANICAL

Impact Factor (2020) : 54.17

Journal Impact Factor Rank : 127/276

Journal Impact Factor Percentile : 3.09

Journal Impact Factor Quartile : Q2

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