Conferences
  • Publication
  • Conferences
[2023 COMPUMAG] Design for Torque Ripple and Eddy Current Loss Reduction in 3kW Dry Vacuum Pump Motor for ETCH Process using Separated Rotating Tapering
2024-01-29 17:19:08 4

Title : Design for Torque Ripple and Eddy Current Loss Reduction in 3kW  Dry Vacuum Pump Motor for ETCH Process using Separated Rotating Tapering

Authors : 최도현, 양인준, 홍민기, 정동훈, 김원호


Conference : 2023 COMPUMAG

Date : 2023.05

Location : Kyoto, Japan

파일 다운로드를 위해서는
비밀번호 확인이 필요합니다.